Work

4K Detectors Array for On-Wafer EUV Imaging in Lithography Control Beyond 5-nm Node

Year: 2023

Type: article

Source: IEEE Transactions on Electron Devices

DOI: 10.1109/ted.2023.3311413

Authors: Wei Chang, Chien-Ping Wang, Yao-Hung Huang, Burn Jeng Lin, Pin-Jiun Wu, Jiaw-Ren Shih, Yue-Der Chih, Jonathan Chang, Chrong Jung Lin, Ya-Chin King

Institutions: National Tsing Hua University, National Synchrotron Radiation Research Center, Taiwan Semiconductor Manufacturing Company (Taiwan)

Language: English

Topic: CCD and CMOS Imaging Sensors

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Taiwan Semiconductor Manufacturing Company, Ministry of Science and Technology, Taiwan

Award: G6614175964

OpenAlex ID: W4386737439

FWCI: 0.366

Cites: 36

Cited by: 5

Related to: 10