LRSDP: Low-Rank SDP for Triple Patterning Lithography Layout Decomposition
Year: 2023
Type: conference-paper
Authors: Yu Zhang, Yifan Chen, Zhonglin Xie, Hong Xu, Zaiwen Wen, Yibo Lin, Bei Yu
Institutions: Chinese University of Hong Kong, Peking University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4386764301