Year: 2022
Type: conference-paper
Abstract: This work presents the design, fabrication, and testing of a pillar-based microforce sensor for in-plane force sensing.The novelty of the sensor lies in its design that combines a high aspect ratio SU-8 pillar with 6µm diameter, fabricated on top of a doped silicon piezoresistor with lateral dimensions of 2x2µm or 3x3µm, which acts as the embedded active sensing element.The substrateembedded sensing element measures the out-of-plane stress created by in-plane (transverse) forces applied to the pillar tip.A force resolution <1 µN is achieved with a lateral device footprint that is at least ten times smaller than previous MEMS force sensors.Moreover, the sensor design based on silicon piezoresistors allows for (integrated) electrical readout and scalable fabrication of sensor arrays for mechanical cell characterization.
Authors: Isha Lodhi, Durga Gajula, Devin Brown, Wilbur Lam, David Myers, Oliver Brand
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W4386823436