Year: 2022
Type: conference-paper
Abstract: This paper reports on the design, fabrication, and characterization of a vacuum encapsulated wide bandwidth micro-g out-of-plane accelerometer with differential output utilizing electrostatic frequency modulation.The accelerometer consists of a proof-mass suspended by torsional springs, differential pair of freefree beam (FFB) resonators as transducers, and top-layer polysilicon capacitive electrodes deposited and bridged over TEOS-filled trenches which define the resonators and proof-mass in the device layer of an SOI wafer.The fabricated device measures a scale factor of 41.2Hz/g with a resonator Q of 1800 and a proof-mass Q of 6.7 at 19kHz, which enable low-noise operation in a wide bandwidth.The accelerometer demonstrates high performance with a VRW corresponding to noise density of 5.8μg/√Hz and a bias instability of 23μg, without temperature compensation.The demonstrated performance, while promising, can be further improved by applying temperature compensation techniques to the electronics interface.
Authors: Seungyong Shin, Tanya Chauhan, Justin Matthews, Haoran Wen, Farrokh Ayazi
Institution: Georgia Institute of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W4386823653