Work

Compact EUV Sources for Metrology and Irradiation Experiments

Year: 2023

Type: book-chapter

Source: SPIE eBooks

DOI: 10.1117/3.2638242.ch10

Authors: Jochen Vieker, Florian Melsheimer, Klaus Bergmann, Alexander von Wezyk

Institutions: Fraunhofer Institute for Laser Technology, Forschungszentrum Jülich

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4386863882

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Related to: 10