Work

Machine learning for rapid inference of critical dimensions in optical metrology of nanopatterned surfaces

Year: 2023

Type: article

Source: CIRP journal of manufacturing science and technology

DOI: 10.1016/j.cirpj.2023.10.001

Authors: Ramin Sabbagh, Alec Stothert, Dragan Djurdjanovic

Institutions: The University of Texas at Austin, MathWorks (United States)

Language: English

Topic: Industrial Vision Systems and Defect Detection

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: bronze

Funders: National Science Foundation, University of Texas at Austin

Award: NSF Nanosystems Engineering Research Center for Nanomanufacturing Systems for Mobile Computing and Energy Technologies (NASCENT)

OpenAlex ID: W4387834905

FWCI: 1.197

Cites: 49

Cited by: 9

Related to: 10