Work

Impedance Sensing in CMOS-Embedded Microfluidics Using BEOL Electrodes

Year: 2023

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2023.3326973

Authors: Wei-Yang Weng, Jun-Chau Chien

Institutions: National Taiwan University, University of California, Berkeley

Language: English

Topic: Microfluidic and Capillary Electrophoresis Applications

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Taiwan University

OpenAlex ID: W4388283448

FWCI: 0.147

Cites: 23

Cited by: 2

Related to: 10