Work

Development of an ultra-compact inline transmission grating spectrograph for extreme ultraviolet wavelengths

Year: 2023

Type: conference-paper

Source: International Conference on Extreme Ultraviolet Lithography

DOI: 10.1117/12.2683682

Authors: Sascha Brose, Serhiy Danylyuk, Bernhard Lüttgenau, Ismael Gisch, Lars Lohmann, Jochen Stollenwerk, Carlo Holly

Institutions: Fraunhofer Institute for Laser Technology, Jülich Aachen Research Alliance, RWTH Aachen University

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4388625681

FWCI: 0.513

Cites: 30

Cited by: 1

Related to: 10