Three-dimensional aerial images of periodic patterns and the depth of focus for lines-and-spaces patterns (Erratum)
Year: 2023
Type: erratum
Abstract: Erratum corrects several errors in mathematical expressions.
Author: Anthony Yen
Institution: ASML (Netherlands)
Language: English
Subfield: Computer Vision and Pattern Recognition
Field: Computer Science
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W4389487232