Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using extreme ultraviolet, coherent diffractive imaging reflectometry
Work
Year: 2023
Type: article
Authors Michael Tanksalvala, Yuka Esashi, Christina L. Porter, Nicholas W. Jenkins, Bin Wang +8 more
Institutions University of Colorado Boulder, Northwestern University, IMEC, Kapteyn Murnane Laboratories
Cites: 4
Cited by:
Related to: 10
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Citation percentile (by year/subfield):
Subfield: Radiation
Field: Physics and Astronomy
Domain: Physical Sciences
Sustainable Development Goal Sustainable cities and communities
Open Access status: closed