Roadmap for focused ion beam technologies
Work
Year: 2023
Type: article
Abstract: The focused ion beam (FIB) is a powerful tool for fabrication, modification, and characterization of materials down to the nanoscale. Starting with the gallium FIB, which was originally intended for p... more
Source: Applied Physics Reviews
Institutions Ferdinand-Braun-Institut, TU Wien, University of California, Berkeley, Luxembourg Institute of Science and Technology, Institut de Microelectrònica de Barcelona +19 more
Cites: 1,102
Cited by: 36
Related to: 10
FWCI: 11.18
Citation percentile (by year/subfield): 99.99
Subfield: Computational Mechanics
Field: Engineering
Domain: Physical Sciences
Sustainable Development Goal Industry, innovation and infrastructure
Open Access status: hybrid
Grant ID CA19140