Work

Investigation on chemical mechanical polishing of Ga-faced GaN crystal with weak alkaline slurry

Year: 2024

Type: article

Source: Applied Surface Science

DOI: 10.1016/j.apsusc.2024.159396

Authors: Qiubo Li, Lei Liu, Jiaoxian Yu, Shouzhi Wang, Guodong Wang, Zhongxin Wang, Zhanguo Qi, Xuanyi Zhao, Guangxia Liu, Xiangang Xu, Lei Zhang

Institutions: Shandong University, State Key Laboratory of Crystal Materials, Shandong Urban Construction Vocational College, Qilu University of Technology, Shandong Academy of Sciences

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Shandong University, State Key Laboratory of Crystal Materials, National Natural Science Foundation of China, Natural Science Foundation of Shandong Province, Taishan Scholar Project of Shandong Province, Science, Technology and Innovation Commission of Shenzhen Municipality

Awards: G1493245663, G3857022461, G3897825067, G4909490974, G4937667646, G6080217398, G7134198275, G7397690222, G8439619646

OpenAlex ID: W4391074072

FWCI: 2.196

Cites: 28

Cited by: 21

Related to: 10