Work

4H-SiC Beam Resonators with Tailored Local Zero TCF

Year: 2024

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/mems58180.2024.10439318

Authors: Yaoyao Long, Zhenming Liu, Xinyu Jiang, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Army Research Laboratory

OpenAlex ID: W4392024722

FWCI: 2.275

Cites: 16

Cited by: 3

Related to: 10