Work

TA 0.34Deg/Hour Bulk Acoustic Wave Gyroscope in 4H Silicon-Carbide with an Elevated-Temperature Enhanced Q-Factor of 4.6 Million

Year: 2024

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/mems58180.2024.10439512

Authors: Zhenming Liu, Yaoyao Long, Charlotte M. Wehner, Haoran Wen, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: EMI

OpenAlex ID: W4392026712

FWCI: 9.386

Cites: 9

Cited by: 10

Related to: 10