Defect inspection methodology for contact holes
Work
Year: 2024
Type: article
Authors Dieter Van den Heuvel, Christophe Béral, Bhavishya Chowrira, Philippe Foubert, Danilo De Simone +9 more
Institutions IMEC, Hitachi High-Tech (Japan), Hitachi (Japan)
Cites: 6
Cited by: 1
Related to: 10
FWCI: 0.462
Citation percentile (by year/subfield): 64.34
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed