Characterizing Sub-micron 3D Defects from Intact Advanced Packages to Wafer Level Packaging using a Suite of Novel 3D X-ray Tools at Down to 0.3 μm Spatial Resolution
Year: 2023
Type: conference-paper
Institution: Sigray (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4392910410
