Work

Impact of Atomic Defects on Ceria Surfaces on Chemical Mechanical Polishing of Silica Glass Surfaces

Year: 2024

Type: article

Source: Langmuir

DOI: 10.1021/acs.langmuir.3c03557

Authors: Mirko Di Biase, Luca Brugnoli, Katsuaki Miyatani, Masatoshi Akaji, Takumi Yoshida, Shingo Urata, Alfonso Pedone

Institutions: University of Modena and Reggio Emilia, Centre National de la Recherche Scientifique, Chimie ParisTech - PSL, Université Paris Sciences et Lettres, Institut de Recherche de Chimie Paris, Asahi Glass (Japan)

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: AGC

OpenAlex ID: W4392972385

FWCI: 4.177

Cites: 39

Cited by: 38

Related to: 10