Understanding the stability of advanced inorganic-organic hybrid thin films for advanced resist applications
Work
Year: 2024
Type: article
Institutions The University of Texas at Dallas, Stony Brook University, State University of New York, Inha University
Cites: 16
Cited by: 2
Related to: 10
FWCI: 1.295
Citation percentile (by year/subfield): 100
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Sustainable Development Goal Life on land
Open Access status: closed