Work

Exploring EUV scanner design options enabled by free electron laser sources

Year: 2024

Type: conference-paper

Source: SPIE Optical and EUV Nanolithography

DOI: 10.1117/12.3012410

Author: Thomas V. Pistor

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4394602245

FWCI: 4.084

Cites: 7

Cited by: 6

Related to: 10