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Comparison of Fourier optics-based methods for modeling coherence scanning interferometry
Work
Year: 2024
Type: article
Abstract: Coherence scanning interferometry (CSI) is a widely used optical method for surface topography measurement of industrial and biomedical surfaces. The operation of CSI can be modeled using approximate ... more
Cites: 42
Cited by: 2
Related to: 10
FWCI: 1.277
Citation percentile (by year/subfield): 69.85
Sustainable Development Goal Sustainable cities and communities
Open Access status: hybrid