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Multicolor lithography, a promising approach to large-area nanopatterning

Year: 2024

Type: conference-paper

Source: SPIE Novel Patterning Technologies

DOI: 10.1117/12.3010932

Authors: Sandra A. Gutierrez Razo, Nikolaos Liaros, Nicholas Fisher, Andrea N. Zeppuhar, Mona Abostate, John S. Petersen, Daniel E. Falvey, Amy S. Mullin, John T. Fourkas

Institution: University of Maryland, College Park

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4399603072

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