Work

Ion beam smoothing of fused silica at atomic-scale assisted by damage recovery using inductively coupled plasma

Year: 2024

Type: article

Source: Precision Engineering

DOI: 10.1016/j.precisioneng.2024.08.003

Authors: Bing Wu, Shaoxiang Liang, Junqi Zhang, Xuemiao Ding, Tom Chiu, Pei Huang, Yinhui Wang, Hui Deng

Institution: Southern University of Science and Technology

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Natural Science Foundation of Guangdong Province, Science, Technology and Innovation Commission of Shenzhen Municipality, National Key Research and Development Program of China

Awards: G1483401921, G1648201870, G3013182322, G6463477755, G7700139431, G8349028833, G8671331378, G8946905342

OpenAlex ID: W4401425181

FWCI: 0.523

Cites: 36

Cited by: 5

Related to: 10