Work

A High Quality Factor, 19-GHz Periodically Poled AlScN BAW Resonator Fabricated in a Commercial XBAW Process

Year: 2024

Type: article

Source: IEEE Transactions on Electron Devices

DOI: 10.1109/ted.2024.3435175

Authors: Izhar, Merrilyn M. A. Fiagbenu, Xingyu Du, Pariasadat Musavigharavi, Yang Deng, Akhil Gunda, Jeff Leathersich, Craig Moe, Abhay Kochhar, Eric A. Stach, Ramakrishna Vetury, Roy H. Olsson

Institution: University of Pennsylvania

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Defense Advanced Research Projects Agency

OpenAlex ID: W4401454156

FWCI: 2.236

Cites: 37

Cited by: 21

Related to: 10