Dark-field surface defects detection method for multi-surface-shape large aperture optical components
Year: 2024
Type: article
Source: Applied Optics
DOI: 10.1364/ao.531320
Authors: Shiwei Guo, Shiling Wang, Shaowen Wang, Lan Wu, Dong Liu
Institutions: Zhejiang University, China Jiliang University
Language: English
Subfield: Industrial and Manufacturing Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: 熔石英光学元件亚表面缺陷数字化标定技术研究, G2604709029
OpenAlex ID: W4401456195