Work

High Quality Epitaxial Piezoelectric and Ferroelectric Wurtzite Al1‐xScxN Thin Films

Year: 2024

Type: article

Source: Small Methods

DOI: 10.1002/smtd.202400722

Authors: Yang Zeng, Yihan Lei, Yanghe Wang, Mingqiang Cheng, Luocheng Liao, Xuyang Wang, Jinxin Ge, Zhenghao Liu, Wenjie Ming, Chao Li, Shuhong Xie, Jiangyu Li, Changjian Li

Institutions: Xiangtan University, Southern University of Science and Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Natural Science Foundation of Guangdong Province, Shenzhen Science and Technology Innovation Program

Awards: G3286885289, G6355787740, G7769297428

OpenAlex ID: W4401464323

FWCI: 1.367

Cites: 54

Cited by: 13

Related to: 10