Work

An electrostatically actuated MEMS microgripper with high amplification for precision manipulation

Year: 2024

Type: article

Abstract: This paper presents a low-voltage electrostatically actuated MEMS microgripper with high amplified displacements. The design incorporates a novel compliant mechanical amplifier that efficiently converts vertical motions into horizontal motions, resulting in a high amplification ratio of 9.25. The design incorporates a capacitive displacement sensor that can accurately measure the jaw movement. Finite Element Analysis (FEA) is utilized to optimize the design parameters, considering the fabrication constraints. The fabrication is based on the SOIMUMPs process, combined with an in-house etching process. Experimental testing demonstrates a maximum jaw displacement of 26.8 μm at a low applied voltage of 18V. A successful grasping of a micro-object is demonstrated, which validates the practicality and effectiveness of the proposed design. Such a microgripper can be promising for the growing need for precise micromanipulation in various applications such as biological cell manipulation and microassembly.

Source: Sensors and Actuators A Physical

DOI: 10.1016/j.sna.2024.115800

Authors: Yousef Algoos, Wagner B. Lenz, Fahimullah Khan, Mohammad I. Younis

Institutions: King Abdullah University of Science and Technology, International Iberian Nanotechnology Laboratory, Binghamton University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: hybrid

Estimated APC paid: $3,540

Funders: National Science Foundation, King Abdullah University of Science and Technology