Work

Effects of Ceria Abrasives on the Chemical Mechanical Polishing of Molybdenum Film with Alkaline H2O2 Slurries

Year: 2024

Type: article

Source: ECS Journal of Solid State Science and Technology

DOI: 10.1149/2162-8777/ad6f41

Authors: Lianfeng Hu, Yingjie Wang, Qiancheng Sun, Chun-Feng Hu, Haijun Cheng, Xin-Ping Qu

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4401559589

FWCI: 0.526

Cites: 42

Cited by: 5

Related to: 10