Work

Application of anlogic infotech EG4D20 FPGA in wafer and chip defect observation

Year: 2024

Type: conference-paper

Source: International Conference on Machine Vision, Automatic Identification, and Detection (MVAID)

DOI: 10.1117/12.3035739

Authors: Yaqian Deng, Siyu Zheng, Yunzhou Qiu, Gentuan Jia, Cheng Liu

Institutions: Shanghai University, Shanghai Institute of Microsystem and Information Technology

Language: English

Topic: Industrial Vision Systems and Defect Detection

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4401632905

FWCI: 0.755

Cites:

Cited by: 1

Related to: 10