Work

Durable fluoride nanocomposite coatings for photolithography

Year: 2024

Type: conference-abstract

Source: International Conference on Laser, Optics and Optoelectronic Technology (LOPET)

DOI: 10.1117/12.3040019

Authors: Yingfu Li, Xinshang Niu, Hongfei Jiao, Jinlong Zhang, Xinbin Cheng, Zhanshan Wang

Institution: Tongji University

Language: English

Topic: Optical Coatings and Gratings

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4401633069

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