Work

Research on 3D fabrication technology of monocrystalline silicon microlens array femtosecond laser

Year: 2024

Type: conference-paper

Source: International Conference on Laser, Optics and Optoelectronic Technology (LOPET)

DOI: 10.1117/12.3040132

Authors: Tianfeng Zhou, Hui Wu, Peng Liu, Linkang Li, Qiuchen Xie

Institution: Beijing Institute of Technology

Language: English

Topic: Laser Material Processing Techniques

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4401633335

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