Work

Doping Profile Meter for Semiconductor Structures

Year: 2024

Type: article

Source: Measurement Interdisciplinary Research and Perspectives

DOI: 10.1080/15366367.2024.2390340

Authors: Fedor Manyakhin, Dmitry Varlamov, Lyudmila Morketsova, Arkady Skvortsov, Vladimir Nikolaev

Institution: Moscow Polytechnic University

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

Funder: Ministry of Science and Higher Education of the Russian Federation

OpenAlex ID: W4401638065

FWCI:

Cites: 18

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Related to: 10