Phase transition kinetics and sublayer optimization of HfO2/ZrO2 superlattice ferroelectric thin films
Year: 2024
Type: article
Source: Applied Physics Letters
DOI: 10.1063/5.0221607
Institution: Huazhong University of Science and Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G7734260955, G7804837571
OpenAlex ID: W4401704670
