Work

Impedance matching design for capacitively coupled plasmas considering coaxial cables

Year: 2024

Type: article

Source: Journal of Physics D Applied Physics

DOI: 10.1088/1361-6463/ad7151

Authors: Shimin Yu, Zili Chen, Jingwen Xu, Hongyu Wang, Lu Wang, Zhijiang Wang, Wei Jiang, Julian Schulze, Ya Zhang

Institutions: Wuhan University of Technology, Anshan Normal University, Huazhong University of Science and Technology, Ruhr University Bochum

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Award: G3658540377

OpenAlex ID: W4401746185

FWCI: 0.924

Cites: 29

Cited by: 9

Related to: 10