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A high-performance microwave plasma source employing dielectric wedges

Year: 2024

Type: article

Source: Journal of Physics D Applied Physics

DOI: 10.1088/1361-6463/ad7148

Authors: Fengming Yang, Wencong Zhang, Kama Huang, Yang Yang, Huacheng Zhu

Institutions: Sichuan University, Guiyang University

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Award: G4144726923

OpenAlex ID: W4401747884

FWCI: 0.513

Cites: 38

Cited by: 5

Related to: 10