Work

Highly Doped Single Crystal Al₁-ₓScₓN Bulk Acoustic Resonators for High-Frequency and Wideband Applications

Year: 2024

Type: article

Source: IEEE Transactions on Electron Devices

DOI: 10.1109/ted.2024.3443237

Authors: Congquan Zhou, Wentong Dou, Ruidong Qin, Jinghong Lu, Yumeng Yang, Zhiqiang Mu, Wenjie Yu

Institutions: Chinese Academy of Sciences, Shanghai Institute of Microsystem and Information Technology, ShanghaiTech University

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Shanghai Technology Innovation Project

Awards: G5126721112, G5641087971, G7410707197

OpenAlex ID: W4401749783

FWCI: 2.622

Cites: 37

Cited by: 25

Related to: 10