Work

Feature Extraction From Diffraction Images Using a Spatial Light Modulator in Scatterometry

Year: 2024

Type: article

Source: IEEE Transactions on Semiconductor Manufacturing

DOI: 10.1109/tsm.2024.3448458

Authors: Jinyang Li, Hung-Fei Kuo

Institution: National Taiwan University of Science and Technology

Language: English

Topic: Optical Polarization and Ellipsometry

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Science and Technology Planning Project

Award: G5841071926

OpenAlex ID: W4401806175

FWCI: 0.107

Cites:

Cited by: 1

Related to: 10