Work

Visualization of P+ JTE Embedded Rings Used for Peripheral Protection of High Voltage Schottky Diodes by the Optical Beam Induced Current (OBIC) Technique

Year: 2024

Type: article

Abstract: This paper presents micro-OBIC measurements performed at different biasing on two power devices protected by a combination of P+ rings embedded in a JTE Zone. Thanks to the micro-OBIC micrometer spatial resolution, small gaps can be visible on OBIC profiles. Thus, the spatial variation of the micro-OBIC signal accurately reflects the topology of the periphery protection: combination of JTE and rings and channel stopper. These measurements agree with the electric field distribution (calculated by finite element method) along the structure.

Source: Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena

DOI: 10.4028/p-d65yun

Authors: Dominique Planson, Dominique Tournier, Pascal Bevilacqua, Camille Sonneville, Pierre Brosselard, Gabrielle Moulin, Luong Viet Phung, Philippe Godignon

Institutions: Lyon 1 Université, Université Grenoble Alpes

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: hybrid

OpenAlex ID: W4401835357

FWCI:

Cites: 6

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Related to: 10