A proof of concept for hybrid nano-imprint lithography
Year: 2024
Type: conference-paper
DOI: 10.1117/12.3032401
Authors: Tetsuro Nakasugi, Kazuya Fukuhara
Institution: KIOXIA Corporation (Japan)
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4401871326