Work

A short wavelength light source for lithography using a regenerative liquid metal bismuth target

Year: 2024

Type: conference-paper

DOI: 10.1117/12.3032351

Authors: Tatsuya Soramoto, Ayaka Ogiwara, Tsukasa Sugiura, Hiroki Morita, Takeshi Higashiguchi

Institution: Utsunomiya University

Language: English

Topic: Laser-Plasma Interactions and Diagnostics

Subfield: Nuclear and High Energy Physics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4401871335

FWCI:

Cites: 5

Cited by:

Related to: 10