Work

Local registration (LREG) measurement for beam deflector monitoring

Year: 2024

Type: conference-paper

DOI: 10.1117/12.3032675

Authors: Chun Chieh Han, Yi Chen Chuang, Wei Shan Chen, Wen Wei Lee, Colbert Lu

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4401871346

FWCI:

Cites: 4

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Related to: 10