Work

Deposition of high-density carbon layer for beyond EUV lithography

Year: 2024

Type: conference-paper

DOI: 10.1117/12.3034871

Authors: Umi Fujimoto, Tetsuo Harada, Shinji Yamakawa, Takeo Watanabe

Institution: University of Hyogo

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4401871353

FWCI: 0.78

Cites: 17

Cited by: 1

Related to: 10