Beyond EUV binary and phase shift masks simulation
Year: 2024
Type: conference-paper
DOI: 10.1117/12.3034370
Authors: Naoki Hayase, Tetsuo Harada
Institutions: The Open University of Japan, University of Hyogo
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4401871356