Work

Make a core engine ready to empower high quality multi-beam mask writer for N2 node and beyond

Year: 2024

Type: conference-paper

DOI: 10.1117/12.3032467

Authors: Patrick P. W. Lee, Peter J. Y. Chang, Frankie F. G. Tsai, Harry C. Y. Ku, Min-Da Cheng, Joey J. Y. Wang, M. J. Lii, Jacqueline Atanelov, Anh-Dai Dang, Samuel Kvasnica

Institutions: Taiwan Semiconductor Manufacturing Company (Taiwan), IMS Nanofabrication (Austria)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4401871380

FWCI: 0.78

Cites: 7

Cited by: 1

Related to: 10