Effects of external parameters on plasma characteristics and uniformity in a dual cylindrical inductively coupled plasma
Year: 2024
Type: article
Source: Plasma Science and Technology
Authors: Pengyu 鹏宇 WANG 王, Siyu 思雨 XING 邢, Daoman 道满 HAN 韩, Yuru 钰如 ZHANG 张, Yong 永 LI 李, Cheng 成 ZHOU 周, Fei 飞 GAO 高, Younian 友年 WANG 王
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: 面向工业等离子体源的一些关键科学问题的研究, G7118009150
OpenAlex ID: W4401871861