Improvement of critical dimension uniformity using machine learning
Year: 2024
Type: conference-paper
DOI: 10.1117/12.3033042
Authors: KUNIHIRO UGAJIN, Masato Naka, Shingo Kanamitsu
Institution: KIOXIA Corporation (Japan)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4401875304