AFM nanomachining and clean repair of EUV TaBN and high-k advanced absorber materials
Year: 2024
Type: conference-paper
DOI: 10.1117/12.3032093
Authors: Tod E. Robinson, Maria J. Cadena
Institution: Bruker (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4401875358