Work

Actinic blank inspection for high-NA EUV lithography

Year: 2024

Type: conference-paper

DOI: 10.1117/12.3033664

Authors: Ryo Watanabe, Tomoro Ide, Shohei Sakuma, Tomohiro Suzuki

Institution: Lasertec Corporation (Japan)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4401875506

FWCI:

Cites: 3

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Related to: 10