Work

A study of CrOx composed progressive defect on attenuated PSM and its damaged-free removal process

Year: 2024

Type: conference-paper

DOI: 10.1117/12.3032717

Authors: Joyce Wang, Josh Cheng, Ewin Zhuo, Kevin Yu, Ansel Huang, Mazer Li, Kuang Huang, Zack Huang

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4401877277

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Cites: 4

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Related to: 10