Work

Aluminum-based mirrors with an aluminum fluoride protective coating: a comparative study of small and large-scale atomic layer deposition systems (Conference Presentation)

Year: 2024

Type: conference-paper

DOI: 10.1117/12.3016475

Authors: Søren A. Tornøe, John J. Hennessy, Nobuhiko P. Kobayashi

Institutions: University of California, Santa Cruz, California Institute of Technology

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4401878013

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