Anomaly Classification and Key Segment Detection in Semiconductor Manufacturing Processes Using Image-Based Siamese Networks
Year: 2024
Type: article
Authors: Jung In Kim, Chunghyup Mok, Hyeonji Kim, Jaehoon Kim, Hyoheon Ko, Jihoon Hong, Ju Yeon Yun, Jeong Hun Ko, Yeonjung Kim, Jiyoul Lee, Hyodong Ban, Seoung Bum Kim
Language: English
Subfield: Control and Systems Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4401924859